Extremely low-loss vertically-tapered spot size converter in InP-based waveguide structure
نویسندگان
چکیده
Low-loss spot size converters (SSC) are important elements for coupling photonic integrated circuits to fibres. We have developed a Cl2-based inductively-coupled-plasma process to etch non-selectively InP and photo-resist (PR). This process was then used to transfer a vertically-tapered PR pattern into an InP/InGaAsP structure. The tapered PR pattern was made using a standard optical lithography combined with sliding-mask technique. One, 2 and 3-mm long SSCs were fabricated and characterized. Excess losses between 0.5-2 dB were measured for all SSCs. We also fabricated lateral SSCs using the same epi-structure, however these SSCs showed higher losses (>4dB/SSC).
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